JPH02108171U - - Google Patents

Info

Publication number
JPH02108171U
JPH02108171U JP1761489U JP1761489U JPH02108171U JP H02108171 U JPH02108171 U JP H02108171U JP 1761489 U JP1761489 U JP 1761489U JP 1761489 U JP1761489 U JP 1761489U JP H02108171 U JPH02108171 U JP H02108171U
Authority
JP
Japan
Prior art keywords
substrate
image
incidence
respect
approximately
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1761489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1761489U priority Critical patent/JPH02108171U/ja
Publication of JPH02108171U publication Critical patent/JPH02108171U/ja
Pending legal-status Critical Current

Links

JP1761489U 1989-02-17 1989-02-17 Pending JPH02108171U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1761489U JPH02108171U (en]) 1989-02-17 1989-02-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1761489U JPH02108171U (en]) 1989-02-17 1989-02-17

Publications (1)

Publication Number Publication Date
JPH02108171U true JPH02108171U (en]) 1990-08-28

Family

ID=31231556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1761489U Pending JPH02108171U (en]) 1989-02-17 1989-02-17

Country Status (1)

Country Link
JP (1) JPH02108171U (en])

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